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Pressure sensor core helium leak detection system
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Products
Air tightness testing equipment
Semiconductor Industry - Helium Leak Detection Equipment
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Product Details
Pressure sensor core helium leak detection system
One: Basic working principle:
According to the basic leak detection principle of helium leak detection, the workpiece is divided into two independent sealing chambers with a fixture: a helium-filled cavity and a leak detection cavity, using helium as a tracer gas, filling the helium-filled cavity with helium, and then detecting the helium signal in the leak detection cavity through the helium leak detector, which can judge the leakage of the workpiece with high precision, quickly and accurately.
2. Basic parameters
| project | parameter |
| Leak detection accuracy | 1.0E-8Pa.m3/sec |
| Detect pressure | 50KPa (downward adjustable) |
| Production beats | 10 sec/piece |
Two: Basic functions
The operator puts the workpiece in the fixture, presses the start button, the fixture automatically seals the product, and then fully automatically completes the whole process of evacuating, filling helium, micro-leakage detection, helium emissions, etc., with fast production cycle and high leak detection accuracy.
The equipment adopts process automation technology, the process equipment and electrical automatic control technology combined, by PLC and touch screen for the entire workpiece detection process automatic control, the operator only needs to install and unload the workpiece, no need for the operator to judge the results of each process, by the PLC program according to the preset conditions automatically judge the results of the previous step and complete the execution of the next step, it not only saves physical labor, but also replaces human judgment and execution, liberates people from complex mental work.
Since the entire testing process engineering of the product is automatically completed by the equipment, there is no need for the operator's judgment and execution, which avoids the influence of human factors on the testing results and ensures the consistency, objectivity, stability and repeatability of the operation.
keyword:
detection system
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